Redeye is an Infrared Reflection Fingerprint (IRF) system based on Non-Fourier Transform longwave infrared reflection off surfaces of production wafers. IRF is sensitive to chemical compositions, stack structures and film thickness and is ideal for thin-metal dielectric film monitoring. Long wavelengts eliminates mask dependent scattering. Excellent throughput allows integrated metrology for high volume manufacturing.

The TEEMAP sensor family is based on advanced thermal radiometry to precisely control thermal conditions in-situ. Advanced optical design and sensor technology allow to perform non-contact single point or 2D temperature measurements from outside the process chamber through existing viewports.